Preparation and characterization of nanocrystalline cubic boron nitride by microwave plasma‐enhanced chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105236
Reference13 articles.
1. Current Issues and Problems in the Chemical Vapor Deposition of Diamond
2. Synthesis of BN films by the plasma CVD with various solids: BH3NH3, H3BO3 and NaBH4
3. Formation of Cubic Boron Nitride Films by Boron Evaporation and Nitrogen Ion Beam Bombardment
4. Radio frequency sputter deposited boron nitride films
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