Titanium silicide formation: Effect of oxygen distribution in the metal film
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.332946
Reference20 articles.
1. Growth Kinetics Observed in the Formation of Metal Silicides on Silicon
2. Solid state reactions in titanium thin films on silicon
3. Reaction of thin metal films with SiO2 substrates
4. Backscattering analysis of the successive layer structures of titanium silicides
5. Thin film interaction between titanium and polycrystalline silicon
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