Simulation of the step coverage for chemical vapor deposited silicon dioxide
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350908
Reference11 articles.
1. Monte Carlo simulation of thin‐film deposition in a rectangular groove
2. Deposition Profile Simulation Using the Direct Simulation Monte Carlo Method
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4. Simulation of Mass Transport for Deposition in Via Holes and Trenches
5. A Study on Film Precursors in SiH4 Thermal CVD by use of Trench Coverage Measurements
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