Thermal modeling and experimental study of infrared nanosecond laser ablation of silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3271413
Reference16 articles.
1. Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation
2. Laser ablation of Si in water and ambient air
3. Laser induced removal of spherical particles from silicon wafers
4. Plastic Deformation in Silicon Crystal Induced by Heat-Assisted Laser Shock Peening
5. Dislocation behavior in silicon crystal induced by laser shock peening: A multiscale simulation approach
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