Plasma vacuum ultraviolet emission in an electron cyclotron resonance etcher
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.123909
Reference9 articles.
1. The effects of processing on radiation damage in SiO2
2. Radiation Damage in SiO2/Si Induced by VUV Photons
3. Radiation Damage to Thermal Silicon Dioxide Films in Radio Frequency and Microwave Downstream Photoresist Stripping Systems
4. In Situ Monitoring of Radiation Damage to Thermal Silicon Dioxide Films Exposed to Downstream Oxygen Plasmas
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