Plasma etch effects on low‐temperature selective epitaxial growth of silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350968
Reference19 articles.
1. Electrical characteristics of diodes fabricated in selective-epitaxial silicon wells
2. Selective low-pressure silicon epitaxy for MOS and bipolar transistor application
3. Selective Epitaxial Trench (SET)
4. Silicon wafer preparation for low-temperature selective epitaxial growth
5. Dichlorosilane effects on low‐temperature selective silicon epitaxy
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