Defect‐free epitaxial lateral overgrowth of oxidized (111) Si by liquid phase epitaxy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.103689
Reference8 articles.
1. SOI by CVD: Epitaxial Lateral Overgrowth (ELO) process—Review
2. Silicon Layers Grown on Patterned Substrates by Liquid Phase Epitaxy
3. Epitaxial Lateral Overgrowth of Si by LPE with Sn Solution and Its Orientation Dependence
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