Fabrication and properties of polycrystalline‐SiC/Si structures for Si heterojunction devices
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105519
Reference6 articles.
1. Production of large‐area single‐crystal wafers of cubic SiC for semiconductor devices
2. ‘‘Buffer‐layer’’ technique for the growth of single crystal SiC on Si
3. Epitaxial Growth and Characterization of β ‐ SiC Thin Films
4. Growth Characteristics of CVD Beta‐Silicon Carbide
5. Epitaxial growth of β–SiC on Si by low-temperature chemical vapor deposition
Cited by 19 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of Si nanoparticles on electronic transport mechanisms in P-doped silicon-rich silicon nitride/c-Si heterojunction devices;Materials Science in Semiconductor Processing;2016-08
2. SiC nanocrystals: high-rate deposition and nano-scale control by thermal plasma;RSC Adv.;2014
3. Low-temperature processing and properties of nanocrystalline-SiC/crystalline Si heterojunction devices;Solid-State Electronics;2006-02
4. Structural and electrical properties of low-temperature PECVD SiC/c-Si heterostructures;Materials Science and Engineering: B;2004-09
5. Hydrogenated nanocrystalline silicon carbide: fabrication, properties and heterostructure device application;physica status solidi (c);2004-01-19
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3