Hydrogenated nanocrystalline silicon carbide: fabrication, properties and heterostructure device application
Author:
Affiliation:
1. LERMAT, CNRS 2149, 6 bd Maréchal Juin, 14050 Caen, France
Publisher
Wiley
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssc.200303922
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3. Neutron-irradiation effect on the electrical characteristics of amorphous silicon carbide and nitrogen-doped silicon carbide films prepared by PECVD technology;physica status solidi (a);2013-10-21
4. The effect of neutron irradiation on the properties of SiC and SiC(N) layer prepared by plasma enhanced chemical vapor deposition;Applied Surface Science;2013-03
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