Residual stresses in evaporated silicon dioxide thin films: Correlation with deposition parameters and aging behavior
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.360290
Reference21 articles.
1. Effects of vacuum exposure on stress and spectral shift of high reflective coatings
2. Sorbed water and intrinsic stress in composite TiO2‐SiO2films
3. Temperature dependence of stresses in chemical vapor deposited vitreous films
4. Stress in silicon dioxide films deposited using chemical vapor deposition techniques and the effect of annealing on these stresses
5. Effects of humidity on stress in thin silicon dioxide films
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