Corona discharge supersonic free-jet for III–V nitride growth via A 3Σu+ metastable nitrogen molecules
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1331646
Reference45 articles.
1. Group III nitride semiconductors for short wavelength light-emitting devices
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4. Atomic nitrogen production in a high efficiency microwave plasma source
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