Characterization of planar periodic structure using inverse laser scanning confocal microscopy moiré method and its application in the structure of butterfly wing-Reference-Cited by-同舟云学术

Characterization of planar periodic structure using inverse laser scanning confocal microscopy moiré method and its application in the structure of butterfly wing

Published:2007-05-15 Issue:10 Volume:101 Page:103511
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Xie Huimin,Wang Qinghua,Kishimoto Satoshi,Dai Fulong

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2732548

Reference21 articles.

1. Novel methodology for postexposure bake calibration and optimization based on electrical linewidth measurement and process metamodeling

2. Measurement of arbitrary strain profiles within fibre gratings

3. Fiber Bragg grating (FBG) characterization and shaping by local pressure

4. The synthesis of multiple parameters of arbitrary FBGs via a genetic algorithm and two thermally modulated intensity spectra

5. Mathematical modelling of indirect measurements in scatterometry

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