Three-dimensional imaging of undercut and sidewall structures by atomic force microscopy
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3553199
Reference10 articles.
1. Atomic Force Microscope
2. Erratum: Novel optical approach to atomic force microscopy [Appl. Phys. Lett. 53, 1045 (1988)]
3. Scanned‐cantilever atomic force microscope
4. A new, optical‐lever based atomic force microscope
5. Optical scan‐correction system applied to atomic force microscopy
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