Crystallization to polycrystalline silicon thin film and simultaneous inactivation of electrical defects by underwater laser annealing
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4772513
Reference17 articles.
1. XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's
2. Low temperature poly-Si TFT-LCD by excimer laser anneal
3. Selective crystallization of amorphous silicon thin film by a CW green laser
4. Thin-Film Devices Fabricated on Double-Layered Polycrystalline Silicon Films Formed by Green Laser Annealing
5. Low-Voltage Driven P-Type Polycrystalline Silicon Thin-Film Transistor Integrated Gate Driver Circuits for Low-Cost Chip-on-Glass Panel
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