Short time electron cyclotron resonance hydrogenation of polycrystalline silicon thin‐film transistor structures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102543
Reference6 articles.
1. Influence of hydrogen implantation on the resistivity of polycrystalline silicon
2. Hydrogen passivation of PolySilicon MOSFET's from a plasma Nitride source
3. Low-temperature polycrystalline silicon thin-film transistors for displays
4. High-performance poly-Si TFTs with ECR-plasma hydrogen passivation
5. Study of ECR Hydrogen Plasma Treatment on Poly-Si Thin Film Transistors
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