Effect of space charge polarization in radio frequency microelectromechanical system capacitive switch dielectric charging
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2347278
Reference13 articles.
1. IEEE MTT-S Int. Microwave Symp. Dig. 2000;Goldsmith C. L.
2. Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)
3. IEEE MTT-S Int. Microwave Symp. Dig. 2004;Yuan X.
4. RF MEMS
5. A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches
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