Sub-20 nm patterning of thin layer WSe2 by scanning probe lithography
Author:
Affiliation:
1. Instituto de Ciencia de Materiales, CSIC, Sor Juana Inés de la Cruz 3, 28049 Madrid, Spain
Funder
Ministerio de Economía y Competitividad (MINECO)
Seventh Framework Programme (FP7)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4965840
Reference34 articles.
1. Electronics based on two-dimensional materials
2. Electronic properties of transition-metal dichalcogenides
3. Photosensor Device Based on Few-Layered WS2Films
4. MoS2 Field-Effect Transistor for Next-Generation Label-Free Biosensors
5. Single-Layer Transition Metal Dichalcogenide Nanosheet-Based Nanosensors for Rapid, Sensitive, and Multiplexed Detection of DNA
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