Study on growth processes of particles in germane radio frequency discharges using laser light scattering and scanning electron microscopic methods
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.367420
Reference18 articles.
1. Powder dynamics in very high frequency silane plasmas
2. Analysis of high-rate a-Si:H deposition in a VHF plasma
3. Particulate formation and dusty plasma behaviour in argon-silane RF discharge
4. Diagnostics of particle genesis and growth in RF silane plasmas by ion mass spectrometry and light scattering
5. Possible routes for cluster growth and particle formation in RF silane discharges
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