Author:
Stranak V.,Herrendorf A.-P.,Drache S.,Cada M.,Hubicka Z.,Tichy M.,Hippler R.
Subject
Physics and Astronomy (miscellaneous)
Reference17 articles.
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3. High power pulsed magnetron sputtering of transparent conducting oxides
4. Fully dense, non-faceted 111-textured high power impulse magnetron sputtering TiN films grown in the absence of substrate heating and bias
5. Titanium oxide thin films deposited by high-power impulse magnetron sputtering
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