Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm-Reference-Cited by-同舟云学术

Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm

Published:2017-11-14 Issue:18 Volume:122 Page:185302
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Kuang Shang-qi¹,Gong Xue-peng²,Yang Hai-gui³

Affiliation:

1. School of Science, Changchun University of Science and Technology, Changchun 130022, China

2. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

3. Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

Funder

Jilin Scientific and Technological Development Plan

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4995806

Reference23 articles.

1. Atomic-precision multilayer coating of the first set of optics for an extreme-ultraviolet lithography prototype system

2. Nanometer interface and materials control for multilayer EUV-optical applications

3. Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry

4. Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers

5. Determination of layer-thickness fluctuations in Mo/Si multilayers by cross-sectional HR-TEM and X-ray diffraction

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