Emission spectra and etching of polymers and graphite irradiated by excimer lasers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.334211
Reference11 articles.
1. Self‐developing photoetching of poly(ethylene terephthalate) films by far‐ultraviolet excimer laser radiation
2. Ablative photodecomposition: action of far-ultraviolet (193 nm) laser radiation on poly(ethylene terephthalate) films
3. Kinetics of the ablative photodecomposition of organic polymers in the far ultraviolet (193 nm)
4. Direct etching of polymeric materials using a XeCl laser
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