Nanolithography by selective chemical vapor deposition with an atomic hydrogen resist

Author:

Mitsui Toshiyuki,Hill Eric,Ganz Eric

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Nanoparticle-assisted growth of nanowires;Integrated Silicon-Metal Systems At the Nanoscale;2023

2. Al-alkyls as acceptor dopant precursors for atomic-scale devices;Journal of Physics: Condensed Matter;2021-09-01

3. Chemical Routes for Transfer of Atomic-Scale Patterns;Encyclopedia of Interfacial Chemistry;2018

4. Manipulation and Patterning of Surfaces (Nanolithography);Fundamentals and Applications of Nano Silicon in Plasmonics and Fullerines;2018

5. Nanoscale Fabrication;Microsystems and Nanotechnology;2012

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