Growth temperature dependence of the Si(001)/SiO2interface width
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.111054
Reference16 articles.
1. The Si–SiO2 interface: Correlation of atomic structure and electrical properties
2. A structural study of the thermally oxidized Si(001) wafer by X-ray CTR scattering
3. A structural study of the thermally oxidized Si(001) wafer by X-ray CTR scattering
4. A structural study of the thermally oxidized Si(001) wafer by X-ray CTR scattering
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