Ion beam generation from sheath field of grid electrode and its application to surface treatment
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2400390
Reference16 articles.
1. Recent developments and applications of plasma immersion ion implantation
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4. PBII processing of dielectric layers: physical aspects limitations and experimental results
5. Control of plasma parameters and wall sheath voltage in radio frequency magnetron discharge by grid bias
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1. Structural characteristics of the upstream sheath of the ion optics and its application in evaluating the beam performance of an ion thruster;Journal of Applied Physics;2022-01-14
2. Numerical and theoretical modeling of the sheath upstream of ion optics: sheath structure transition and its effect on the beam divergence;Plasma Sources Science and Technology;2021-07-01
3. Analysis of grid electrode assisted plasma based ion implantation system and application to ion beam assisted deposition for insulator substrates;Thin Solid Films;2018-08
4. Normalized ion distribution function in expanding sheaths of 2D grid electrodes;Plasma Sources Science and Technology;2016-02-12
5. Sheath expansion of two-dimensional grid electrodes subjected to short pulses of negative high-voltage;Plasma Sources Science and Technology;2015-01-13
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