Influence of aluminum additions on phase formation in boron nitride films deposited by magnetron sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1538322
Reference14 articles.
1. Phase control of cubic boron nitride thin films
2. On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition
3. Pressure dependence of the negative bias voltage for stabilization of cubic boron nitride thin films deposited by sputtering
4. Recent results in cubic boron nitride deposition in light of the sputter model
5. Effect of stoichiometry on the phases present in boron nitride thin films
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1. Role of hydrogen in the growth of boron nitride: Cubic phase versus hexagonal phase;Computational Materials Science;2014-02
2. Structure and properties of gallium nitride thin films deposited on Si (111) by using radio-frequency magnetron sputtering;Journal of the Korean Physical Society;2013-02
3. Properties of nanostructured cubic boron nitride films prepared by the short-pulse laser plasma deposition techniques;International Journal of Refractory Metals and Hard Materials;2009-09
4. Influence of some substitutional defects on the relative stability and cohesive properties of cubic boron nitride;Diamond and Related Materials;2006-01
5. Review of synthesis and properties of cubic boron nitride (c-BN) thin films;International Materials Reviews;2005-12
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