Low voltage electron beam lithography in self‐assembled ultrathin films with the scanning tunneling microscope
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.111157
Reference8 articles.
1. Electron-beam lithography with the scanning tunneling microscope
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3. Deep UV Photochemistry of Chemisorbed Monolayers: Patterned Coplanar Molecular Assemblies
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5. Self‐assembled monolayer electron beam resist on GaAs
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