Dual-frequency capacitive discharges: Effect of low-frequency current on electron distribution function-Reference-Cited by-同舟云学术

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Dual-frequency capacitive discharges: Effect of low-frequency current on electron distribution function

Published:2005-05 Issue:5 Volume:12 Page:053501
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Kim H. C.,Lee J. K.

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1888325

Reference31 articles.

1. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz

2. The space-time-averaging procedure and modeling of the RF discharge II. Model of collisional low-pressure RF discharge

3. Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode

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1. Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual-frequency capacitively coupled argon plasma;Plasma Sources Science and Technology;2022-07-01

2. Effect of 2 MHz frequency power applied to the substrate for low-temperature silicon nitride thin film deposition;Materials Science in Semiconductor Processing;2022-06

3. Characteristics of a dual-radio-frequency cylindrical inductively coupled plasma;Contributions to Plasma Physics;2019-02-04

4. Modulation of electron energy distribution functions and plasma parameters in a dual-frequency cylindrical ICP source;Plasma Research Express;2018-11-30

5. Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source;Plasma Sources Science and Technology;2018-05-23

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