Deposition kinetics and characterization of stable ionomers from hexamethyldisiloxane and methacrylic acid by plasma enhanced chemical vapor deposition
Author:
Affiliation:
1. Institute of Solid State Physics, NAWI Graz, Graz University of Technology, Petersgasse 16, 8010 Graz, Austria
2. Surface and Interface Physics, Institute of Physics, NAWI Graz, University of Graz, Universitätsplatz 5, 8010 Graz, Austria
Funder
Austrian Science Fund (FWF)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4945578
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