High-temperature degradation in plasma-enhanced chemical vapor deposition Al2O3 surface passivation layers on crystalline silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4891634
Reference44 articles.
1. Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
2. High efficiency n-type Si solar cells on Al2O3-passivated boron emitters
3. Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3
4. Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
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