Design and experiment of generalized triple-cross-spring flexure pivots applied to the ultra-precision instruments
Author:
Funder
NNSFC
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4897271
Reference19 articles.
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2. A novel long-travel piezoelectric-driven linear nanopositioning stage
3. Development of novel hybrid flexure-based microgrippers for precision micro-object manipulation
4. Three-Phase Electrostatic Rotary Stepper Micromotor With a Flexural Pivot Bearing
5. High-Angular-Range Electrostatic Rotary Stepper Micromotors Fabricated With SOI Technology
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