Diamondlike carbon deposition on silicon using radio-frequency inductive plasma of Ar and C2H2 gas mixture in plasma immersion ion deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.122469
Reference10 articles.
1. Growth of Thin Chemically Bonded Diamondlike Films by Ion Beam Deposition
2. Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon
3. Highly tetrahedral, diamond‐like amorphous hydrogenated carbon prepared from a plasma beam source
4. Highly tetrahedral, diamond‐like amorphous hydrogenated carbon prepared from a plasma beam source
5. Materials Science Issues of Plasma Source Ion Implantation
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