Quantitative photoexcitation study of SiH4in vacuum ultraviolet
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.450506
Reference19 articles.
1. Emission spectroscopy of SiH in a silane glow-discharge
2. Origin of emitting species in the plasma deposition of a‐Si:H alloys
3. High resolution absorption and emission spectroscopy of a silane plasma in the 1800–2300 cm−1 range
4. Dissociative excitation of SiH4, SiD4, Si2H6 and GeH4 by 0–100 eV electron impact
5. Emission spectra of SiH(A 2Δ→X 2Π) and SiCl2(Ã 1B1→X̃ 1A1) in the VUV photolyses of silane and chlorinated silanes
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