Study of cobalt‐disilicide formation from cobalt monosilicide
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.334419
Reference10 articles.
1. Refractory silicides for integrated circuits
2. Epitaxial silicides
3. Cobalt silicide layers on Si. I. Structure and growth
4. Interactions in the Co/Si thin‐film system. II. Diffusion‐marker experiments
5. Cobalt silicide layers on Si. II. Schottky barrier height and contact resistivity
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