Thickness dependence of the effective dielectric constant in a thin film capacitor
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.121930
Reference5 articles.
1. Dielectric Properties of (Ba, Sr)TiO3Thin Films Deposited by RF Sputtering
2. (Ba+Sr)/Ti ratio dependence of the dielectric properties for (Ba0.5Sr0.5)TiO3 thin films prepared by ion beam sputtering
3. Dielectric Properties of(BaxSr1-x)TiO3Thin Films Prepared by RF Sputtering for Dynamic Random Access Memory Application
4. Step Coverage and Electrical Properties of(Ba,Sr)TiO3Films Prepared by Liquid Source Chemical Vapor Deposition UsingTiO(DPM)2
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