Hydrogen elimination and phase transitions in pulsed-gas plasma deposition of amorphous and microcrystalline silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.364309
Reference31 articles.
1. Performance of thin hydrogenated amorphous silicon thin‐film transistors
2. Effects of trap-state density reduction by plasma hydrogenation in low-temperature polysilicon TFT
3. Electrical Properties of Ultralarge Grain Polycrystalline Silicon Film Produced by Excimer-Laser Recrystallization Method
4. Influence of hydrogen and oxygen plasma treatments on grain‐boundary defects in polycrystalline silicon
5. Low Thermal Budget Poly-Si Thin Film Transistors on Glass
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