Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas-Reference-Cited by-同舟云学术

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Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas

Published:2017-01 Issue:1 Volume:24 Page:013508
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Choi Ikjin¹,Kim Aram¹,Lee Hyo-Chang²,Kim Dong-Hwan³,Chung Chin-Wook¹³

Affiliation:

1. Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea

2. Center for Vacuum Technology, Korea Research Institute of Standard and Science, Daejeon 305-340, South Korea

3. Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea

Funder

National Research Foundation of Korea (NRF)

Ministry of Trade, Industry and Energy (MOTIE)

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4972576

Reference29 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?

3. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz

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1. Effects of oxygen concentration on the electron energy distribution functions in atmospheric pressure helium/oxygen and argon/oxygen needle-electrode plasmas;Journal of Physics D: Applied Physics;2018-08-09

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