Model for a transformer-coupled toroidal plasma source
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3679565
Reference15 articles.
1. Remote microwave plasma source for cleaning chemical vapor deposition chambers: Technology for reducing global warming gas emissions
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2. Modeling of plasma processing reactors: review and perspective;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-11-22
3. Influence of gas type and input power on ion distribution in transformer coupled toroidal plasma;2023 IEEE 6th International Electrical and Energy Conference (CIEEC);2023-05-12
4. Effects of N2 and O2 plasma treatments of quartz surfaces exposed to H2 plasmas;Journal of Vacuum Science & Technology A;2022-09
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