Low-temperature growth of SiCAlN films of high hardness on Si(111) substrates
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1413723
Reference13 articles.
1. Computational Alchemy: The Search for New Superhard Materials
2. Large‐band‐gap SiC, III‐V nitride, and II‐VI ZnSe‐based semiconductor device technologies
3. Initial stage of aluminum nitride film growth on 6H‐silicon carbide by plasma‐assisted, gas‐source molecular beam epitaxy
4. Composition and Properties of Hot-Pressed SiC-AIN Solid Solutions
5. Investigation of Phase Stability in the System Sic-AlN
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