Nickel-affected silicon crystallization and silicidation on polyimide by multipulse excimer laser annealing
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3531562
Reference16 articles.
1. Surface-scattering effects in polycrystalline silicon thin-film transistors
2. Flexible Electronics
3. High-Performance Polycrystalline Silicon TFT on the Structure of a Dopant-Segregated Schottky-Barrier Source/Drain
4. Low-Temperature Annealing Combined with Laser Crystallization for Polycrystalline Silicon TFTs on Polymeric Substrate
5. Nickel-enhanced solid-phase epitaxial regrowth of amorphous silicon
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