Fabricating metal-oxide-semiconductor field-effect transistors on a polyethylene terephthalate substrate by applying low-temperature layer transfer of a single-crystalline silicon layer by meniscus force
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4837696
Reference23 articles.
1. Amorphous-Silicon Thin-Film Transistors Fabricated at 300 $^{\circ}\hbox{C}$ on a Free-Standing Foil Substrate of Clear Plastic
2. Effect of electrical and mechanical stresses of low temperature a-Si:H thin film transistors fabricated on polyimide and glass substrates
3. Anomalous behavior of negative bias illumination stress instability in an indium zinc oxide transistor: A cation combinatorial approach
4. Flexible a-IZO thin film transistors fabricated by solution processes
5. Effects of microwave annealing on electrical enhancement of amorphous oxide semiconductor thin film transistor
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Development of high-yield layer transfer process of single-crystalline silicon thin films on plastic substrate and its application to multi-functional device integration;Japanese Journal of Applied Physics;2020-02-04
2. Single-Crystalline Si-CMOS Circuit Fabrication on Polyethylene Terephthalate Substrate by Meniscus Force-Mediated Layer Transfer;IEEE Journal of the Electron Devices Society;2019
3. Reliability improvement of a flexible FD-SOI MOSFET via heat management;Applied Physics Letters;2017-06-19
4. Formation of silicon-on-insulator layer with midair cavity for meniscus force-mediated layer transfer and high-performance transistor fabrication on glass;Japanese Journal of Applied Physics;2015-07-02
5. Meniscus-force-mediated layer transfer technique using single-crystalline silicon films with midair cavity: Application to fabrication of CMOS transistors on plastic substrates;Japanese Journal of Applied Physics;2015-03-20
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