Electron temperature and soft x-ray intensity scaling in laser heavy element plasma interaction

Author:

Kawasaki Hiromu1,Sunahara Atsushi23ORCID,Shimada Yuta1,Ejima Takeo4ORCID,Jiang Weihua5,O’Sullivan Gerry6,Nishikino Masaharu7,Namba Shinichi8ORCID,Higashiguchi Takeshi1ORCID

Affiliation:

1. Department of Electrical and Electronic Engineering, Faculty of Engineering, Utsunomiya University, 7-1-2 Yoto, Utsunomiya, Tochigi 321-8585, Japan

2. Center for Materials Under Extreme Environment (CMUXE), School of Nuclear Engineering, Purdue University, West Lafayette, Indiana 47907, USA

3. Institute of Laser Engineering, Osaka University, 2-6 Yamadaoka, Suita, Osaka 565-0871, Japan

4. Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1, Katahira, Aoba-ku, Sendai 980-8577, Japan

5. Department of Electrical Engineering, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan

6. School of Physics, University College Dublin, Belfield, Dublin 4, Ireland

7. Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology (QST), Kizugawa, Kyoto 619-0215, Japan

8. Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashihiroshima, Hiroshima 739-8527, Japan

Funder

Japan Society for the Promotion of Science

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Evaluation of suprathermal ions in a laser-produced plasma beyond-EUV source;Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology;2023-09-29

2. Thomson scattering measurements of electron temperature and electron density in laser-driven Gd plasmas;Journal of Physics D: Applied Physics;2023-07-12

3. Study of the 6.x nm short wavelength radiation spectra of laser-produced erbium plasmas for BEUV lithography;Plasma Science and Technology;2023-02-28

4. Soft X-ray spectra of Cerium laser-produced plasmas;Journal of Physics B: Atomic, Molecular and Optical Physics;2021-12-14

5. Charge-separated spectra of suprathermal highly charged bismuth ions in a dual laser-produced plasma soft x-ray source;Review of Scientific Instruments;2020-08-01

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