Similarity of capacitive radio-frequency discharges in nonlocal regimes-Reference-Cited by-同舟云学术

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Similarity of capacitive radio-frequency discharges in nonlocal regimes

Published:2020-11 Issue:11 Volume:27 Page:113501
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Fu Yangyang¹²^ORCID,Zheng Bocong²³^ORCID,Zhang Peng²^ORCID,Fan Qi Hua²³⁴^ORCID,Verboncoeur John P.¹²^ORCID,Wang Xinxin⁵^ORCID

Affiliation:

1. Department of Computational Mathematics, Science and Engineering, Michigan State University, East Lansing, Michigan 48824, USA

2. Department of Electrical and Computer Engineering, Michigan State University, East Lansing, Michigan 48824, USA

3. Fraunhofer Center for Coatings and Diamond Technologies, Michigan State University, East Lansing, Michigan 48824, USA

4. Department of Chemical Engineering and Material Science, Michigan State University, East Lansing, Michigan 48824, USA

5. Department of Electrical Engineering, Tsinghua University, Beijing 10084, China

Funder

National Science Foundation

Air Force Office of Scientific Research

U.S. Department of Energy

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/am-pdf/10.1063/5.0022788

Reference80 articles.

1. Scaling and the design of miniaturized chemical-analysis systems

2. Electron Kinetics in Radio-Frequency Atmospheric-Pressure Microplasmas

3. Scaling laws for gas breakdown for nanoscale to microscale gaps at atmospheric pressure

4. Scaling laws for AC gas breakdown and implications for universality

5. Transition of low-temperature plasma similarity laws from low to high ionization degree regimes

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1. Scale-invariant breathing oscillations and transition of the electron energization mechanism in magnetized discharges;Applied Physics Letters;2024-05-06

2. Similarity laws for two-dimensional simulations of low-pressure capacitively coupled radio-frequency discharges;Physics of Plasmas;2023-12-01

3. Similarity-based scaling networks for capacitive radio frequency discharge plasmas;AIP Advances;2023-09-01

4. Similarity rules for inductive radio frequency plasmas with thermohydrodynamic coupling effects;Journal of Applied Physics;2023-08-11

5. Scale-invariant resonance characteristics in magnetized capacitive radio frequency plasmas;Physics of Plasmas;2023-06-01

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