1. Institute of Ion-Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, 01328 Dresden, Germany
2. Chemnitz University of Technology, 09107 Chemnitz, Germany
3. Anfatec Instruments AG, 08606 Oelsnitz, Germany
4. Institute for Integrative Nanosciences, IFW Dresden, 01069 Dresden, Germany