Evaluation of resolution of flexure parallel mechanisms for ultraprecision manipulation
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1786351
Reference9 articles.
1. Design of Circular Cross-Section Corner-Filleted Flexure Hinges for Three-Dimensional Compliant Mechanisms
2. Parabolic and hyperbolic flexure hinges: flexibility, motion precision and stress characterization based on compliance closed-form equations
3. An ultra-precision XY/spl theta//sub Z/ piezo-micropositioner. I. Design and analysis
4. Optimal design of a flexure hinge based XYφ wafer stage
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