Relaxation phenomena after laser‐induced photodetachment in electronegative rf discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.353294
Reference14 articles.
1. Measurements of negative ion densities in 13.56‐MHz rf plasmas of CF4, C2F6, CHF3, and C3F8using microwave resonance and the photodetachment effect
2. Photodetachment effect in a radio frequency plasma in CF4
3. Negative Ion Kinetics in RF Glow Discharges
4. Cathode region of a transitory discharge inCO2. I. Theory of the cathode region
5. Fluid model simulations of a 13.56‐MHz rf discharge: Time and space dependence of rates of electron impact excitation
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