Substrate bias effect on the formation of nanocrystalline diamond films by microwave plasma-enhanced chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1492864
Reference38 articles.
1. The relationship between the spatially resolved field emission characteristics and the raman spectra of a nanocrystalline diamond cold cathode
2. Electron field emission from thin fine-grained CVD diamond films
3. Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions
4. Control of diamond film microstructure by Ar additions to CH4/H2 microwave plasmas
5. Effect of nitrogen addition on the microstructure and mechanical properties of diamond films grown using high-methane concentrations
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1. Fast, Efficient Tailoring Growth of Nanocrystalline Diamond Films by Fine-Tuning of Gas-Phase Composition Using Microwave Plasma Chemical Vapor Deposition;Materials;2024-06-18
2. Growth of diamond-like carbon films with significant nanocrystalline phases in a low-pressure high-density CH4 plasma in ICP-CVD: Effect of negative dc substrate bias;Applied Surface Science;2022-09
3. Investigation on the influence of high deposition pressure on the mcirostructure and hydrogen impurity incorporated in nanocrystalline diamond films;Journal of Crystal Growth;2018-08
4. Nanocrystalline diamond coatings: Effects of time modulation bias enhanced HFCVD parameters;AIMS Materials Science;2018
5. Nanocrystalline Diamond: Deposition Routes and Clinical Applications;Surgical Tools and Medical Devices;2016
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