Picosecond pulsed laser ablation of dielectric rods: Angle-dependent ablation process model for laser micromachining
Author:
Affiliation:
1. IWF, ETH Zurich, Leonhardstrasse 21, Zurich 8092, Switzerland
2. Inspire AG, ETH Zurich, Technoparkstrasse 1, 8005 Zurich, Switzerland
Funder
Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5092812
Reference12 articles.
1. Laser-induced electric breakdown in solids
2. Ultrashort-pulse laser machining of dielectric materials
3. Short-Pulse Laser Ablation of Solids: From Phase Explosion to Fragmentation
4. Atomistic modeling of ultrashort-pulse ultraviolet laser ablation of a thin LiF film
5. Kinetics of high-density plasmas generated in Si by 1.06- and 0.53-μmpicosecond laser pulses
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