Ionic species responsible for the plasma anodization of silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.100571
Reference6 articles.
1. The role of plasma negative ions in plasma anodization
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4. Ion-neutral reaction-rate constants measured in flow reactors through 1977
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