Characteristics of high-purity Cu thin films deposited on polyimide by radio-frequency Ar/H2 atmospheric-pressure plasma jet
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4795808
Reference19 articles.
1. Plasma surface modification of polyimide films by air glow discharge for copper metallization on microelectronic flex substrates
2. Atmospheric pressure plasmas: A review
3. Spatially and temporally resolved measurements of argon metastable atoms in the effluent of a cold atmospheric pressure plasma jet
4. Rf microplasma jet at atmospheric pressure: characterization and application to thin film processing
5. Spatiotemporally resolved Ar (1s5) metastable measurements in a streamer-like He/Ar atmospheric pressure plasma jet
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