Domain control and periodic poling of epitaxial ScAlN

Author:

Yang Fengyan1ORCID,Yang Guangcanlan1ORCID,Wang Ding2ORCID,Wang Ping2ORCID,Lu Juanjuan1ORCID,Mi Zetian2ORCID,Tang Hong X.1ORCID

Affiliation:

1. Department of Electrical Engineering, Yale University 1 , New Haven, Connecticut 06511, USA

2. Department of Electrical Engineering and Computer Science, University of Michigan 2 , Ann Arbor, Michigan 48109, USA

Abstract

ScAlN is an emerging ferroelectric material that possesses large bandgap and strong piezoelectricity and holds great promises for enhanced χ(2) nonlinearity. In this study, we demonstrate high-fidelity ferroelectric domain switching and periodic poling of Al-polar ScAlN thin film epitaxially grown on a c-axis sapphire substrate using gallium nitride as a buffer layer. Uniform poling of ScAlN with periods ranging from 2 to 0.4 μm is realized. The ability to lithographically control the polarization of epitaxial ScAlN presents a critical advance for its further exploitation in ferroelectric storage and nonlinear optics applications.

Funder

National Science Foundation

Defense Advanced Research Projects Agency

Semiconductor Research Corporation

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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